Condensed Consolidated Balance Sheets (USD $) In Thousands	Jun. 30, 2011	Sep. 30, 2010
Current Assets
Cash and cash equivalents	$ 60,232	$ 56,764
Restricted cash	13,024	6,192
Accounts receivable
Trade (less allowance for doubtful accounts of $203 and $181 at June 30, 2011 and September 30, 2010, respectively)	21,238	9,252
Unbilled and other	33,223	15,231
Inventories	46,311	24,317
Deferred income taxes	5,700	2,130
Other	5,468	2,568
Total current assets	185,196	116,454
Property, Plant and Equipment - Net	13,442	9,577
Deferred Income Taxes - Long Term	3,044	2,660
Intangible Assets - Net	5,336	2,571
Goodwill	13,431	4,839
Total Assets	220,449	136,101
Current Liabilities
Accounts payable	19,601	12,446
Accrued compensation and related taxes	11,994	8,305
Accrued warranty expense	3,057	1,843
Deferred profit	26,224	11,439
Customer deposits	18,308	8,858
Other accrued liabilities	3,100	1,605
Income taxes payable	14,560	6,320
Total current liabilities	96,844	50,816
Income Taxes Payable Long-term and Other	2,103	1,042
Total liabilities	98,947	51,858
Commitments and Contingencies
Stockholders' Equity
Preferred stock; 100,000,000 shares authorized; none issued	0	0
Common stock; $0.01 par value; 100,000,000 shares authorized; shares issued and outstanding: 9,579,561 and 9,209,213 at June 30, 2011 and September 30, 2010, respectively	96	92
Additional paid-in capital	79,908	72,919
Accumulated other comprehensive income (loss)	2,923	(982)
Retained Earnings	32,021	12,214
Total Amtech Systems Inc. stockholders' equity	114,948	84,243
Noncontrolling interest	6,554	0
Total Equity	121,502	84,243
Total Liabilities and Stockholders' Equity	$ 220,449	$ 136,101