EX-21 2 d741932dex21.htm EX-21 EX-21

Exhibit 21

SUBSIDIARIES OF THE REGISTRANT

 

SUBSIDIARY

  

STATE OR OTHER JURISDICTION OF OPERATION

Lam Research AG

   Austria

Lam Research Management GmbH

   Austria

Novellus Systems Export, Inc.

   Barbados

IPEC FSC Ltd

   Barbados

IPEC International Sales FSC Ltd

   Barbados

Novellus Systems, Inc.

   California, United States

Novellus Systems International, LLC

   California, United States

Angstron Systems, Inc.

   California, United States

Gamma Precision Technology

   California, United States

Lam Research International Holdings Ltd.

   Cayman Islands

Lam Research (Shanghai) Co., Ltd.

   China

Lam Research Service Co., Ltd.

   China

Novellus Systems Semiconductor Equipment Shanghai Co. Ltd.

   China

Novellus Systems International Trading (Shanghai) Co. Ltd.

   China

Lam Research International Holding Company

   Delaware, United States

Metryx, Inc.

   Delaware, United States

Novellus International Holdco, LLC.

   Delaware, United States

SpeedFam-IPEC International Services, LLC

   Delaware, United States

Tmation Inc.

   Delaware, United States

Novellus Development Company, LLC

   Delaware, United States

Silfex, Inc.

   Delaware, United States

Lam Research SAS

   France

Lam Research GmbH

   Germany

Lam Research (H.K.) Limited

   Hong Kong

Novellus Systems Service (Hong Kong) Limited

   Hong Kong

Lam Research Illionois IAG, Inc

   Illinois, United States

Lam Research (India) Private Ltd.

   India

Lam Research (Ireland) Limited

   Ireland

Novellus Systems Ireland Ltd.

   Ireland

Lam Research (Israel) Ltd.

   Israel

Lam Research Services Ltd.

   Israel

GaSonics Israel Ltd.

   Israel

Novellus Systems International BV, Israel Branch

   Israel

Lam Research S.r.l.

   Italy

Novellus Systems Italy SRL (in liquidation)

   Italy

Lam Research Co., Ltd.

   Japan

Lam Research Luxembourg S.à.r.l.

   Luxembourg

SpeedFam IPEC (Malaysia) Sdn. Bhd.

   Malaysia

Lam Research Malaysia Sdn. Bhd.

   Malaysia

LAM Research B.V.

   Netherlands

Lam Research International B.V.

   Netherlands

Peter Wolters International Holding Company B.V.

   Netherlands

Novellus Systems International B.V.

   Netherlands

Voumard, Inc.

   New York, United States

Lam Research Korea Limited

   Republic of Korea


SUBSIDIARY

  

STATE OR OTHER JURISDICTION OF OPERATION

Lam Research Korea LLC YH

   Republic of Korea

Novellus Singapore Pte. Ltd., Korea Branch

   Republic of Korea

Corus Manufacturing Ltd.

   Republic of Korea

Lam Research Singapore Pte Ltd

   Singapore

Novellus Systems International BV, Singapore Branch

   Singapore

Novellus Singapore Pte. Ltd.

   Singapore

Novellus Singapore Holdings Pte. Ltd.

   Singapore

Lam Research Holding GmbH

   Switzerland

Lam Research International Sàrl

   Switzerland

Novellus Systems (Schweiz) Holding GmbH

   Switzerland

Voumard Machines Co SARL

   Switzerland

Lam Research Co., Ltd.

   Taiwan

Lam Research (H.K.) Limited, Taiwan Branch

   Taiwan

Novellus Systems Service (Hong Kong) Limited, Taiwan Branch

   Taiwan

Lam Research Ltd.

   United Kingdom

Metryx, Ltd.

   United Kingdom

Lam Research IAG (U.K.) Ltd

   United Kingdom

Novellus Systems UK Limited

   United Kingdom