REVENUE - Schedule of System Revenues of Primary Markets (Details) - Revenue - Equipment and upgrade revenue	3 Months Ended
Sep. 28, 2025	Sep. 29, 2024
Foundry
Concentration Risk [Line Items]
Concentration	60.00%	41.00%
Memory
Concentration Risk [Line Items]
Concentration	34.00%	35.00%
Logic/integrated device manufacturing
Concentration Risk [Line Items]
Concentration	6.00%	24.00%

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Topic 275
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Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef
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Reference 3: http://www.xbrl.org/2003/role/disclosureRef
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-Topic 275
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Reference 7: http://www.xbrl.org/2003/role/exampleRef
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+ Details

- Definition

For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.

+ References + Details