REVENUE - Schedule of System Revenues of Primary Markets (Details) - Equipment and upgrade revenue - Revenue	3 Months Ended	9 Months Ended
Mar. 26, 2023	Mar. 27, 2022	Mar. 26, 2023	Mar. 27, 2022
Memory
Concentration Risk [Line Items]
Concentration by percent	32.00%	66.00%	46.00%	62.00%
Foundry
Concentration Risk [Line Items]
Concentration by percent	46.00%	21.00%	18.00%	26.00%
Logic/integrated device manufacturing
Concentration Risk [Line Items]
Concentration by percent	22.00%	13.00%	36.00%	12.00%

For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 280
-SubTopic 10
-Section 50
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Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
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Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef
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Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef
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Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef
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-Name Accounting Standards Codification
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-URI https://asc.fasb.org/extlink&oid=99393423&loc=d3e6404-108592

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