REVENUE - Schedule of System Revenues of Primary Markets (Details) - Equipment and upgrade revenue - Revenue	3 Months Ended
Sep. 25, 2022	Sep. 26, 2021
Memory
Concentration Risk [Line Items]
Concentration by percent	52.00%	64.00%
Foundry
Concentration Risk [Line Items]
Concentration by percent	34.00%	25.00%
Logic/integrated device manufacturing
Concentration Risk [Line Items]
Concentration by percent	14.00%	11.00%

For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
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