Revenue - Schedule of System Revenues of Primary Markets (Details) - Systems revenue - Revenue benchmark	12 Months Ended
Jun. 27, 2021	Jun. 28, 2020	Jun. 30, 2019
Memory
Concentration Risk [Line Items]
Concentration by percent	61.00%	58.00%	70.00%
Foundry
Concentration Risk [Line Items]
Concentration by percent	32.00%	31.00%	20.00%
Logic/integrated device manufacturing
Concentration Risk [Line Items]
Concentration by percent	7.00%	11.00%	10.00%

For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 280
-SubTopic 10
-Section 50
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Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
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Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
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Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef
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Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
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-URI http://asc.fasb.org/extlink&oid=99393423&loc=d3e6404-108592

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