REVENUE - Schedule of System Revenues of Primary Markets (Details) - Equipment and upgrade revenue	3 Months Ended	9 Months Ended
Mar. 28, 2021	Mar. 29, 2020	Mar. 28, 2021	Mar. 29, 2020
Memory
Concentration Risk [Line Items]
Primary market revenue, percent	62.00%	56.00%	62.00%	57.00%
Foundry
Concentration Risk [Line Items]
Primary market revenue, percent	31.00%	31.00%	31.00%	31.00%
Logic/integrated device manufacturing
Concentration Risk [Line Items]
Primary market revenue, percent	7.00%	13.00%	7.00%	12.00%

For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
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Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef
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