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Revenue - Schedule of System Revenues of Primary Markets (Details) - Systems revenue
12 Months Ended
Jun. 28, 2020
Jun. 30, 2019
Memory    
Concentration Risk [Line Items]    
Concentration by percent 58.00% 70.00%
Foundry    
Concentration Risk [Line Items]    
Concentration by percent 31.00% 20.00%
Logic/integrated device manufacturing    
Concentration Risk [Line Items]    
Concentration by percent 11.00% 10.00%