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REVENUE - Schedule of System Revenues of Primary Markets (Details) - Systems revenue
3 Months Ended 9 Months Ended
Mar. 31, 2019
Mar. 31, 2019
Memory    
Concentration Risk [Line Items]    
Primary market revenue, percent 61.00% 72.00%
Foundry    
Concentration Risk [Line Items]    
Primary market revenue, percent 27.00% 19.00%
Logic/integrated device manufacturing    
Concentration Risk [Line Items]    
Primary market revenue, percent 12.00% 9.00%