X0206 3 2022-03-21 1 0000704532 ONTO INNOVATION INC. ONTO 0001918546 Su May C/O ONTO INNOVATION INC. 16 JONSPIN ROAD WILMINGTON MA 01887 1 0 0 0 Exhibit List: Exhibit 24 - Power of Attorney By: /s/ Yoon Ah Oh For: May Su 2022-03-21