X0306 4 2022-02-07 0 0000704532 ONTO INNOVATION INC. ONTO 0001783605 Jin Ju C/O ONTO INNOVATION INC. 16 JONSPIN ROAD WILMINGTON MA 01887 0 1 0 0 SVP & GM, IBU Common Stock 2022-02-07 4 M 0 1820 0.0 A 9394 D Common Stock 2022-02-07 4 F 0 582 90.42 D 8812 D Common Stock 2022-02-07 4 F 0 217 90.42 D 8595 D Common Stock 2022-02-08 4 F 0 202 93.09 D 8393 D Performance Stock Unit 2022-02-07 4 M 0 910 0.0 D 2022-02-07 2022-02-07 Common Stock 910 0 D This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target. Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person. By: /s/ Steven R. Roth For: Ju Jin 2022-02-09