X0306 4 2021-02-08 0 0000704532 ONTO INNOVATION INC. ONTO 0001795758 HARTUNIAN BARRY C/O ONTO INNOVATION INC. 16 JONSPIN ROAD WILMINGTON MA 01887 0 0 0 1 Global VP, Human Resources Common Stock 2021-02-08 4 A 0 1449 0 A 3058 D Performance Stock Unit 2021-02-08 4 A 0 725 0 A 2023-02-08 Common Stock 725 725 D Performance Stock Unit 2021-02-08 4 A 0 724 0 A 2024-02-08 Common Stock 724 724 D Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date. Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date. /s/ Steven R. Roth FOR: Barry G. Hartunian 2021-02-10