X0306 4/A 2019-10-25 2019-10-29 1 0000704532 Onto Innovation Inc. ONTO 0001723434 Lesaicherre Pierre-Yves C/O ONTO INNOVATION INC. 16 JONSPIN ROAD WILMINGTON MA 01887 0 0 0 1 Former President and CEO Common Stock 2019-10-25 4 M 0 101297 0.00 A 211553 D Common Stock 2019-10-25 4 F 0 102989 35.33 D 108564 D Performance Stock Units 2019-10-25 4 M 0 62500 0.00 D 2020-11-27 Comon Stock 62500 0 D This amendment to Form 4 is being filed to correct the number of shares issued upon the vesting of a performance stock unit and the number of shares withheld to cover taxes, which also resulted in a greater number of shares held after such transactions. This performance stock unit represented a contingent right to receive shares of NANO common stock. The performance stock unit vested with respect to 59,480 shares, resulting in 59,480 shares released at target, and the remainder was cancelled. /s/ Pierre-Yves Lesaicherre 2019-11-11