X0306 4 2019-10-25 1 0000704532 Onto Innovation Inc. NANO 0001723434 Lesaicherre Pierre-Yves C/O NANOMETRICS, INCORPORATED 1550 BUCKEYE DRIVE MILPITAS CA 95035 1 1 0 0 President and CEO Common Stock 2019-10-25 4 M 0 83484 0.00 A 193740 D Common Stock 2019-10-25 4 F 0 92134 35.33 D 101606 D Performance Stock Units 2019-10-25 4 M 0 37063 0.00 D 2022-03-11 Common Stock 37063 0 D Performance Stock Units 2019-10-25 4 M 0 25662 0.00 D 2021-02-23 Common Stock 25662 0 D Performance Stock Units 2019-10-25 4 M 0 62500 0.00 D 2020-11-27 Comon Stock 62500 0 D Each performance stock unit represented a contingent right to receive one share of NANO common stock. The grant was made at 150% of target. The performance stock units vested at target, resulting in the issuance of 2/3 of the shares subject to the performance stock unit, and the remainder of the performance stock unit being cancelled. /s/ Pierre-Yves Lesaicherre 2019-10-29