0000704532 2025-11-25 2025-11-25 0000704532 1 2025-11-25 2025-11-25 0000704532 1 2025-11-25 2025-11-25 0000704532 2 2025-11-25 2025-11-25 iso4217:USD pure shares S-3 S-3ASR EX-FILING FEES 0000704532 ONTO INNOVATION INC. N/A true false S-3 ONTO INNOVATION INC. false Equity common stock, par value $0.001 per share true 641771 125.13 80304805.23 0.0001381 11090.09 80304805.23 11090.09 0.00 11090.09 0.00 Pursuant to Rule 457(c) under the Securities Act of 1933, as amended (the "Securities Act"), the proposed maximum offering price per share and the maximum aggregate offering price are estimated solely for the purpose of calculating the registration fee and are based on the average of the high and low prices per share of the common stock, par value $0.001 per share, of Onto Innovation Inc., as reported on the New York Stock Exchange on November 21, 2025. true Onto Innovation Inc. S-3 333-291695 2025-11-21 11090.09 Equity common stock, par value $0.001 per share 641771 80304805.23 true Onto Innovation Inc. S-3 333-291695 2025-11-21 11090.09 A filing fee of $11,129.09 was previously paid in connection with the Registration Statement on Form S-3 (No. 333-291695) (the "Withdrawn Registration Statement") filed by the registrant on November 21, 2025. The registrant withdrew the Withdrawn Registration Statement by filing a Form RW on November 26, 2025. As the Withdrawn Registration Statement was not declared effective, no securities were sold thereunder. In accordance with Rule 457(p) of the Securities Act, such previously paid filing fee will offset the filing fee payable in connection with this filing.