Business Combinations (Narrative) (Details)	Apr. 26, 2015 USD ($)
Tokyo Electron Limited
Business Combinations [Line Items]
Business Combination, Termination Fee	$ 0

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

No definition available.

Name:	us-gaap_BusinessCombinationSeparatelyRecognizedTransactionsLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration