Entegris, Inc.

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N/A 332052.00000000 NS USD 42442886.64000000 0.270257168785 Long EC CORP BM N 1 N N N Square, Inc. 549300OHIIUWSTIZME52 Square, Inc., Class A 852234103 565201.00000000 NS USD 117748324.33000000 0.749768248153 Long EC CORP US N 1 N N N Monolithic Power Systems, Inc. 529900TB7O85LSZ1XU31 Monolithic Power Systems, Inc. 609839105 888237.00000000 NS USD 491603650.02000000 3.130310427420 Long EC CORP US N 1 N N N 2021-12-30 MFS Series Trust IV Kasey Phillips Kasey Phillips Assistant Treasurer XXXX