SEGMENT INFORMATION (Schedule of net revenue by Capital Equipment end markets (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Jun. 27, 2020	Jun. 29, 2019	Jun. 27, 2020	Jun. 29, 2019
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	$ 150,450	$ 127,109	$ 445,488	$ 400,225
Capital Equipment [Member]
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	111,436	89,860	326,982	286,364
Capital Equipment [Member] | General Semiconductor [Member]
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	51,103	50,040	168,937	120,694
Capital Equipment [Member] | Automotive and Industrial [Member]
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	8,135	16,259	46,906	61,735
Capital Equipment [Member] | LED [Member]
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	36,135	15,194	58,193	39,730
Capital Equipment [Member] | Memory [Member]
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	5,618	2,501	25,471	41,813
Capital Equipment [Member] | Advanced Packaging [Member]
Segment Reporting, Revenue Reconciling Item [Line Items]
Revenues	$ 10,445	$ 5,866	$ 27,475	$ 22,392