GOODWILL AND INTANGIBLE ASSETS (Net intangible assets) (Details) - USD ($) $ in Thousands	12 Months Ended
	Oct. 01, 2016	Oct. 03, 2015
Finite-Lived Intangible Assets [Line Items]
Net intangible assets	$ 50,810	$ 57,471
Wedge bonder developed technology [Member]
Finite-Lived Intangible Assets [Line Items]
Gross intangible assets	74,080	74,080
Accumulated amortization	(37,969)	(35,244)
Net intangible assets	36,111	38,836
Wedge bonder customer relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Gross intangible assets	36,968	36,968
Accumulated amortization	(24,455)	(21,509)
Net intangible assets	12,513	15,459
Wedge bonder trade name [Member]
Finite-Lived Intangible Assets [Line Items]
Gross intangible assets	7,515	7,515
Accumulated amortization	(5,329)	(4,339)
Net intangible assets	2,186	3,176
Wedge bonder other intangible assets [Member]
Finite-Lived Intangible Assets [Line Items]
Gross intangible assets	2,500	2,500
Accumulated amortization	(2,500)	(2,500)
Net intangible assets	$ 0	$ 0
Average estimated useful lives (in years)	1 year 10 months 24 days
Minimum [Member] | Wedge bonder developed technology [Member]
Finite-Lived Intangible Assets [Line Items]
Average estimated useful lives (in years)		7 years
Minimum [Member] | Wedge bonder customer relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Average estimated useful lives (in years)		5 years
Minimum [Member] | Wedge bonder trade name [Member]
Finite-Lived Intangible Assets [Line Items]
Average estimated useful lives (in years)		7 years
Maximum [Member] | Wedge bonder developed technology [Member]
Finite-Lived Intangible Assets [Line Items]
Average estimated useful lives (in years)		15 years
Maximum [Member] | Wedge bonder customer relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Average estimated useful lives (in years)		6 years
Maximum [Member] | Wedge bonder trade name [Member]
Finite-Lived Intangible Assets [Line Items]
Average estimated useful lives (in years)		8 years