GOODWILL AND INTANGIBLE ASSETS (Net intangible assets) (Details) (USD $) In Thousands, unless otherwise specified	6 Months Ended
	Mar. 29, 2014	Sep. 28, 2013
Finite-Lived Intangible Assets [Line Items]
Net intangible assets	$ 8,550	$ 11,209
Wedge bonder developed technology [Member]
Finite-Lived Intangible Assets [Line Items]
Gross intangible assets	33,200	33,200
Accumulated amortization	(26,087)	(23,715)
Net intangible assets	7,113	9,485
Average estimated useful lives (in years)	7 years
Wedge bonder customer relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Gross intangible assets	19,300	19,300
Accumulated amortization	(19,300)	(19,300)
Net intangible assets	0	0
Average estimated useful lives (in years)	5 years
Wedge bonder trade name [Member]
Finite-Lived Intangible Assets [Line Items]
Gross intangible assets	4,600	4,600
Accumulated amortization	(3,163)	(2,876)
Net intangible assets	1,437	1,724
Average estimated useful lives (in years)	8 years
Wedge bonder other intangible assets [Member]
Finite-Lived Intangible Assets [Line Items]
Gross intangible assets	2,500	2,500
Accumulated amortization	(2,500)	(2,500)
Net intangible assets	$ 0	$ 0
Average estimated useful lives (in years)	1 year 10 months 24 days