Subsequent Events - Additional Information (Detail) (USD $) In Thousands, unless otherwise specified	0 Months Ended
Dec. 01, 2013	Feb. 02, 2015
Subsequent Event [Line Items]
Purchase price of business	$ 106,009
Subsequent Event \| Titan Semiconductor Tool Llc
Subsequent Event [Line Items]
Purchase price of business		$ 2,500

Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer.

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 805

-SubTopic 30

-Section 30

-Paragraph 7

-URI http://asc.fasb.org/extlink&oid=6911251&loc=d3e6578-128477

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 805

-SubTopic 30

-Section 30

-Paragraph 8

-URI http://asc.fasb.org/extlink&oid=6911251&loc=d3e6613-128477

Reference 3: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 805

-SubTopic 30

-Section 50

-Paragraph 1

-Subparagraph (b)

-URI http://asc.fasb.org/extlink&oid=35744584&loc=d3e6927-128479

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