Basis Of Presentation (Narrative) (Details) (Rudolph Technologies, Inc [Member])	Sep. 30, 2013	Dec. 31, 2012
Rudolph Technologies, Inc [Member]
Investment In Organization [Line Items]
Investments owned, shares	231,336	273,267

Balance held at close of period in number of shares.

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 12C

-Paragraph Column B

-Article 12

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 12

-Paragraph Column B

-Article 12

Reference 3: http://www.xbrl.org/2003/role/presentationRef

-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 14

-Paragraph Column B

-Article 12

Reference 4: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 946

-SubTopic 320

-Section S99

-Paragraph 6

-Subparagraph (SX 210.12-14.Column B)

-URI http://asc.fasb.org/extlink&oid=6955306&loc=d3e611322-123010

Reference 5: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 946

-SubTopic 320

-Section S99

-Paragraph 1

-Subparagraph (SX 210.12-12.Column B)

-URI http://asc.fasb.org/extlink&oid=6955306&loc=d3e611133-123010

Reference 6: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 946

-SubTopic 320

-Section S99

-Paragraph 4

-Subparagraph (SX 210.12-12C.Column B)

-URI http://asc.fasb.org/extlink&oid=6955306&loc=d3e611225-123010

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:sharesItemType
Balance Type:	na
Period Type:	instant