Subsequent Events (Details) (USD $)	0 Months Ended	12 Months Ended		3 Months Ended	12 Months Ended
	Jan. 23, 2013	Dec. 31, 2012	Dec. 31, 2011	Mar. 22, 2013 Rudolph Technologies, Inc [Member]	Dec. 31, 2012 Rudolph Technologies, Inc [Member]
Subsequent Event [Line Items]
Dividends payable, date declared	Jan. 23, 2013
Dividends payable	$ 0.04
Dividends payable, date to be paid	Feb. 22, 2013
Dividends payable, date of record	Feb. 08, 2013
Number of shares in subsidiary sold				7,500	70,000
Proceeds from sale of available-for-sale securities		$ 874,000	$ 2,000	$ 104,000
Gain on sale of investment securities		$ 794,000	$ 73,000	$ 103,000	$ 794,000