Nature Of Business And Significant Accounting Policies (Narrative) (Details) (USD $)	12 Months Ended
	Dec. 31, 2012 employee ShareBasedCompensationPlan	Dec. 31, 2011 employee
Investment In Organization [Line Items]
Advertising expense	$ 89,000	$ 184,000
Research and development expense	443,000	437,000
Depreciation	71,000	57,000
Number of stock-based employee compensation plan	1
Number of employees that were granted options to purchase common stock	4
Shares granted to each director	2,500
Recognized compensation expense	$ 6,000
Number of employees that exercised options to purchase common stock		2
Number of outside directors that forfeited options to purchase common shares	1
Rudolph Technologies, Inc [Member]
Investment In Organization [Line Items]
Investments owned, shares	273,267	343,267
Employee Stock Option [Member]
Investment In Organization [Line Items]
Exercise of stock options, shares	0	4,500
Forfeited shares	0	0
Director Stock Option [Member]
Investment In Organization [Line Items]
Exercise of stock options, shares	0	0
Forfeited shares	5,000	0