Balance Sheet Components (Details) (USD $) In Thousands	Sep. 30, 2011		Jun. 30, 2011
Accounts receivable, net:
Accounts receivable, gross	$ 484,028		$ 605,376
Allowance for doubtful accounts	(22,388)		(22,106)
Accounts receivable, net	461,640		583,270
Inventories, net:
Customer service parts	155,425		148,466
Raw materials	230,855		235,605
Work-in-process	158,834		131,804
Finished goods	67,489		59,855
Inventories, net	612,603		575,730
Other current assets:
Prepaid expenses	52,601		61,796
Income tax related receivables	58,866		59,774
Other current assets	20,686		25,508
Other current assets, total	132,153		147,078
Land, property and equipment, net:
Land	41,872		41,956
Buildings and leasehold improvements	234,512		234,173
Machinery and equipment	457,103		447,772
Office furniture and fixtures	20,527		19,645
Construction in process	8,689		6,979
Land, property and equipment, gross	762,703		750,525
Less: accumulated depreciation and amortization	(498,424)		(493,167)
Land, property and equipment, net	264,279		257,358
Other non-current assets:
Executive Deferred Savings Plan	115,890	[1]	128,033	[1]
Deferred tax assets - long-term	156,619		173,788
Other	25,690		26,274
Other assets, non-current	298,199		328,095
Other current liabilities:
Warranty	43,603		41,528
Executive Deferred Savings Plan	115,467	[1]	128,088	[1]
Compensation and benefits	123,802		186,761
Income taxes payable	12,313		16,364
Interest payable	21,706		8,769
Accrued litigation costs	2,600		4,824
Other accrued expenses	116,720		112,980
Other liabilities, current	$ 436,211		$ 499,314

[1] KLA-Tencor has a non-qualified deferred compensation plan whereby certain executives and non-employee directors may defer a portion of their compensation. Participants are credited with returns based on their allocation of their account balances among measurement funds. The Company controls the investment of these funds and the participants remain general creditors of KLA-Tencor. Distributions from the plan commence the quarter following a participant’s retirement or termination of employment, except in cases where such distributions are required to be delayed in order to avoid a prohibited distribution under Internal Revenue Code Section 409A. As of September 30, 2011, the Company had a deferred compensation plan related asset and liability included as a component of other non-current assets and other current liabilities on its Condensed Consolidated Balance Sheet.