X0202 5 2006-06-30 0 0 0 0000319201 KLA TENCOR CORP klac 0001181467 BINGHAM H RAYMOND 160 RIO ROBLES SAN JOSE CA 95134 1 0 0 0 Common Stock - Restricted Stock Units 1000 D Non-Qualified Stock Option 40.24 2005-05-11 2015-05-11 Common Stock 2500 2500 D Non-Qualified Stock Option 40.68 2004-10-18 2014-10-18 Common Stock 2500 2500 D Non-Qualified Stock Option 44.76 2005-01-25 2015-01-25 Common Stock 5000 5000 D Non-Qualified Stock Option 47.23 2001-11-09 2011-11-09 Common Stock 10000 10000 D Non-Qualified Stock Option 47.86 2006-05-02 2013-05-02 Common Stock 1250 1250 D Non-Qualified Stock Option 49.99 2005-11-04 2012-11-04 Common Stock 3750 3750 D Non-Qualified Stock Option 51.35 2005-08-02 2012-08-02 Common Stock 2500 2500 D Non-Qualified Stock Option 51.98 2006-01-31 2013-01-31 Common Stock 1250 1250 D Non-Qualified Stock Option 52.75 2000-08-15 2010-08-15 Common Stock 20000 20000 D Non-Qualified Stock Option 59.44 2003-11-05 2013-11-05 Common Stock 10000 10000 D Voluntary filing of Form 5 to show all holdings as of 6/30/2006. H. Raymond Bingham 2006-08-14