X0202 5 2006-06-30 1 0 0 0000319201 KLA TENCOR CORP klac 0001269919 COHEN AVI 160 RIO KOBLES SAN JOSE CA 95130 0 1 0 0 VP, Pattern Solutions Group Common Stock 3196 D Common Stock - Restricted Stock Units 33333 D Non-Qualified Stock Option 26.25 2001-11-10 2010-11-10 Common Stock 8750 8750 D Non-Qualified Stock Option 29.31 2002-10-02 2011-10-02 Common Stock 22500 22500 D Non-Qualified Stock Option 32.75 2002-04-04 2011-04-04 Common Stock 8750 8750 D Non-Qualified Stock Option 33.75 2000-10-27 2009-10-27 Common Stock 24000 24000 D Non-Qualified Stock Option 34.67 2003-11-08 2013-01-28 Common Stock 12500 12500 D Non-Qualified Stock Option 37.05 2003-11-08 2012-11-08 Common Stock 6250 6250 D Non-Qualified Stock Option 40.66 2004-10-27 2014-08-02 Common Stock 6000 6000 D Non-Qualified Stock Option 41.79 2005-09-21 2014-09-21 Common Stock 75000 75000 D Non-Qualified Stock Option 44.6875 2001-08-13 2010-08-13 Common Stock 17500 17500 D Non-Qualified Stock Option 45.16 2004-10-27 2014-04-26 Common Stock 10000 10000 D Non-Qualified Stock Option 47.95 2006-09-26 2012-09-26 Common Stock 75000 75000 D Non-Qualified Stock Option 51.229 2003-11-08 2013-07-30 Common Stock 6250 6250 D Non-Qualified Stock Option 53.86 2004-10-27 2013-10-27 Common Stock 16000 16000 D Non-Qualified Stock Option 58.1 2004-10-27 2014-01-27 Common Stock 8000 8000 D Includes 574 shares purchased through the Employee Stock Purchase Plan during the fiscal year. Voluntary filing of form to show holdings as of 6/30/2006. No longer subject to Section 16 effective 8/3/2006. Avi Cohen 2006-08-11