X0202 4 2006-02-17 0 0000319201 KLA TENCOR CORP KLAC 0001299172 Hall Jeffrey C/O KLA-TENCOR CORPORATION 160 RIO ROBLES SAN JOSE CA 95130 0 1 0 0 Chief Financial Officer Common Stock-Restricted Stock Units 2006-02-17 4 A 0 15000 0 A 25000 D Common Stock 1923 D Non-Qualified Stock Option (right to buy) 52.53 2006-02-17 4 A 0 15000 0 A 2007-02-17 2013-02-17 Common Stock 15000 15000 D Non-Qualified Stock Option (right to buy) 29.31 2002-10-02 2011-10-02 Common Stock 10200 10200 D Non-Qualified Stock Option (right to buy) 34.67 2003-11-08 2013-01-28 Common Stock 5500 5500 D Non-Qualified Stock Option (right to buy) 37.05 2003-11-08 2012-11-08 Common Stock 3250 3250 D Non-Qualified Stock Option (right to buy) 40.66 2004-10-27 2014-08-02 Common Stock 1950 1950 D Non-Qualified Stock Option (right to buy) 41.79 2005-09-21 2014-09-21 Common Stock 20000 20000 D Non-Qualified Stock Option (right to buy) 45.16 2004-10-26 2014-04-26 Common Stock 3250 3250 D Non-Qualified Stock Option (right to buy) 46.67 2001-11-10 2011-07-10 Common Stock 35811 35811 D Non-Qualified Stock Option (right to buy) 47.95 2006-09-26 2012-09-26 Common Stock 30000 30000 D Non-Qualified Stock Option (right to buy) 51.229 2003-11-08 2013-07-30 Common Stock 3250 3250 D Non-Qualified Stock Option (right to buy) 53.86 2004-10-27 2013-10-27 Common Stock 5200 5200 D Non-Qualified Stock Option (right to buy) 58.1 2004-10-27 2014-01-27 Common Stock 2600 2600 D Each restricted stock unit represents a contingent right to receive one share of KLAC common stock. The restricted stock units vest in two equal installments. The first half vests four years from grant date. The second half vests one year thereafter. By: Stuart J. Nichols For: Jeffrey Hall 2006-02-21