<?xml version="1.0"?>

<ownershipDocument>

    <documentType>4/A</documentType>

    <periodOfReport>2003-05-22</periodOfReport>

    <dateOfOriginalSubmission>2003-05-27</dateOfOriginalSubmission>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000319201</issuerCik>
        <issuerName>KLA TENCOR CORP</issuerName>
        <issuerTradingSymbol>klac</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001186085</rptOwnerCik>
            <rptOwnerName>FORTINO DENNIS J</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>  </rptOwnerStreet1>
            <rptOwnerStreet2>  </rptOwnerStreet2>
            <rptOwnerCity>  </rptOwnerCity>
            <rptOwnerState>  </rptOwnerState>
            <rptOwnerZipCode>  </rptOwnerZipCode>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>Executive Vice President</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <derivativeSecurity>
        <securityTitle>
            <value>Non-Qualified Stock Option</value>
        </securityTitle>
        <conversionOrExercisePrice>
            <value>40.14</value>
        </conversionOrExercisePrice>
        <transactionDate>
            <value>2003-05-22</value>
        </transactionDate>
        <transactionCoding>
            <transactionFormType>4</transactionFormType>
            <transactionCode>A</transactionCode>
            <equitySwapInvolved>0</equitySwapInvolved>
        </transactionCoding>
        <transactionTimeliness>
            <value></value>
        </transactionTimeliness>
        <transactionAmounts>
            <transactionShares>
                <value>1000</value>
            </transactionShares>
            <transactionValue>
                <value>0</value>
            </transactionValue>
            <transactionAcquiredDisposedCode>
                <value>A</value>
            </transactionAcquiredDisposedCode>
        </transactionAmounts>
        <exerciseDate>
            <value>2004-05-22</value>
        </exerciseDate>
        <expirationDate>
            <value>2013-05-22</value>
        </expirationDate>
        <underlyingSecurity>
            <underlyingSecurityTitle>
                <value>Common Stock</value>
            </underlyingSecurityTitle>
            <underlyingSecurityShares>
                <value>1000</value>
            </underlyingSecurityShares>
        </underlyingSecurity>
        <postTransactionAmounts>
            <sharesOwnedFollowingTransaction>
                <value>1000</value>
                <footnoteId id="F1"/>
                <footnoteId id="F2"/>
                <footnoteId id="F3"/>
            </sharesOwnedFollowingTransaction>
        </postTransactionAmounts>
        <ownershipNature>
            <directOrIndirectOwnership>
                <value>D</value>
            </directOrIndirectOwnership>
        </ownershipNature>
    </derivativeSecurity>

    <footnotes>
        <footnote id="F1">Transaction Originally Reported on 5/27/2003 Form 4 Filing</footnote>
        <footnote id="F2">Table I Non-Derivative Securities Beneficially Owned, not reported on original Form 4 Filing

Title of Security   Amount of Securities   Ownership Form
Common Stock         4,713                    Direct</footnote>
        <footnote id="F3">Table II-Derivative Securities Beneficially Owned, not reported on original Form 4

Title of Derivative  Exercise Price  Expiration  Title       Shares Ownership


NQSO                 $10.63          08/31/08    Common Stock  4,667   Direct
NQSO                 $26.25          11/10/10    Common Stock 15,750   Direct
NQSO                 $29.31          10/02/11    Common Stock 45,000   Direct
NQSO                 $32.75          04/04/11    Common Stock 22,500   Direct
NQSO                 $33.75          10/27/09    Common Stock 60,000   Direct
NQSO                 $34.67          01/28/13    Common Stock 25,000   Direct
NQSO                 $37.05          11/08/12    Common Stock 12,500   Direct
NQSO                 $44.6875        08/11/10    Common Stock 5,370    Direct
NQSO                 $44.6875        08/13/10    Common Stock 39,630   Direct</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>Dennis J. Fortino</signatureName>
        <signatureDate>2003-06-25</signatureDate>
    </ownerSignature>

</ownershipDocument>

