Exhibit 21

SUBSIDIARIES OF COHU, INC.

LEGAL ENTITY NAME		PLACE OF INCORPORATION
Delta Design, Inc. (1)		Delaware
FRL, Incorporated		California
Broadcast Microwave Services, Inc. (2)		California
Delta Design (Littleton), Inc.		Delaware
Cohu Foreign Sales Ltd.		Barbados
(1)    Delta Design, Inc. owns the following subsidiaries:
	Delta Design Luxembourg S.à r.l	Luxembourg
	Delta Design Singapore PTE LTD	Singapore
	Delta Design Philippines LLC	Delaware
	Cohu S.A.	Costa Rica
	Delta Design Europe GmbH	Germany
	Rasco GmbH	Germany
	Rosenheim Automation Systems Corporation	California
	Ismeca Semiconductor Holding SA (3)	Switzerland
(2)    Broadcast Microwave Services, Inc. owns the following subsidiary:
	Broadcast Microwave Services Europe GmbH	Germany
(3)    Ismeca Semiconductor Holding SA owns the following subsidiaries:
	Ismeca Europe Semiconductor SA	Switzerland
	CDF Holding USA	Delaware
	Ismeca USA, Inc.	California
	Ismeca Malaysia Sdn	Malaysia
	Ismeca Semiconductor (Suzhou) Co Ltd	China