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Restructuring Charges
9 Months Ended
Jul. 04, 2020
Restructuring and Related Activities [Abstract]  
Restructuring charges RESTRUCTURING CHARGES
In the first quarter of fiscal 2017, we began the implementation of planned restructuring activities in connection with the acquisition of Rofin. The activities under this plan primarily related to the exiting of our legacy HPFL product line, change of control payments to Rofin officers, the exiting of two product lines acquired in the acquisition of Rofin, realignment of our supply chain due to segment reorganization and consolidation of sales and distribution offices as well as certain manufacturing sites. These activities resulted in charges primarily for employee termination, other exit related costs associated with the write-off of property and equipment and inventory and early lease termination costs.

In June 2019, we announced our plans to co-locate the manufacturing and engineering of our HPFL products at our Hamburg, Germany facility to our Tampere, Finland location and exit a portion of our HPFL business. In conjunction with this announcement, we recorded charges in the third quarter of fiscal 2019 of $20.9 million primarily related to write-offs of excess inventory, which is recorded in cost of sales, and estimated severance. We recorded charges in the first, second and third quarters of fiscal 2020 of $0.6 million, $0.5 million and $0.1 million, respectively, primarily related to accelerated depreciation and project management consulting.

We have also announced our intent to vacate our leased facility in Santa Clara at the end of the current lease term in calendar 2020 and combine operations at our Santa Clara headquarters. We exited this facility on July 31, 2020. We did not incur material expenses in fiscal 2019 related to this project. We incurred costs in the first, second and third quarters of fiscal 2020 of $0.2 million, $0.6 million and $0.4 million, respectively, related to this project. We also incurred costs in the first quarter of fiscal 2020 of $0.1 million for other projects.

The following table presents our current liability as accrued on our balance sheets for restructuring charges. The table sets forth an analysis of the components of the restructuring charges and payments and other deductions made against the accrual for the quarters of fiscal 2020 and 2019 (in thousands):
Severance RelatedAsset Write-OffsOtherTotal
Balances, September 28, 2019$8,279  $—  $215  $8,494  
Provision54  599280  933  
Payments and other(658) (599) (275) (1,532) 
Balances, December 28, 20197,675  —  220  7,895  
Provision85  915  79  1,079  
Payments and other(3,715) (915) (87) (4,717) 
Balances, April 4, 20204,045  —  212  4,257  
Provision(77) 554  41  518  
Payments and other(3,136) (554) (31) (3,721) 
Balances, July 4, 2020$832  $—  $222  $1,054  

Severance RelatedAsset Write-OffsOtherTotal
Balances, September 29, 2018$836  $—  $286  $1,122  
Provision212  76  188  476  
Payments and other(447) (76) (244) (767) 
Balances, December 29, 2018601  —  230  831  
Provision282  247  351  880  
Payments and other(201) (247) (516) (964) 
Balances, March 30, 2019682  —  65  747  
Provision9,338  11,798  137  21,273  
Payments and other19  (11,798) (34) (11,813) 
Balances, June 29, 2019$10,039  $—  $168  $10,207  
At July 4, 2020, $1.1 million of accrued severance related and other costs were included in other current liabilities. The asset write-offs for accelerated depreciation and other costs in the first, second and third quarters of fiscal 2020 primarily related to the exit of a portion of our HPFL business in Hamburg, Germany, and costs to vacate our leased facility in Santa Clara and combine operations at our Santa Clara headquarters. The severance related, asset write-offs of inventory and other costs in the first nine months of fiscal 2019 primarily related to the exit of a portion of our HPFL business in Hamburg, Germany.

By segment, $0.1 million and $1.3 million of restructuring costs were incurred in the ILS segment and $0.4 million and $1.2 million were incurred in the OLS segment in the three and nine months ended July 4, 2020, respectively. In the three and nine months ended June 29, 2019, all of the restructuring costs were incurred in the ILS segment and none were incurred in the OLS segment. Restructuring charges are recorded in cost of sales, research and development and selling, general and administrative expenses in our condensed consolidated statements of operations.