Commitments and Contingencies - Additional Information (Detail) (USD $)	1 Months Ended		3 Months Ended			9 Months Ended		12 Months Ended			9 Months Ended
	Oct. 31, 2013	Sep. 30, 2011	Jun. 27, 2014	Mar. 28, 2014	Jun. 28, 2013	Jun. 27, 2014	Jun. 28, 2013	Sep. 28, 2012	Sep. 27, 2013	Jun. 27, 2014 Cercla sites and one past facility	Jun. 27, 2014 Cercla sites and one past facility Minimum	Jun. 27, 2014 Cercla sites and one past facility Maximum	Jun. 27, 2014 Other sites	Jun. 27, 2014 Other sites Minimum	Jun. 27, 2014 Other sites Maximum	Jun. 27, 2014 Tranche A loan	Jun. 27, 2014 Tranche B loan	Jun. 27, 2014 CPTC Loan Tranche A loan	Jun. 27, 2014 CPTC Loan Tranche B loan	Jun. 27, 2014 J.P.Morgan Tranche A loan	Jun. 27, 2014 Siemens AG Strategic Global Partnership	Apr. 30, 2012 Siemens AG Strategic Global Partnership
Commitments And Contingencies [Line Items]
Long term accrued product warranty costs			$ 1,900,000			$ 1,900,000			$ 14,100,000
Loan facility to CPTC		165,300,000															10,000,000
Varian's participation under the CPTC loan facility		115,300,000														70,300,000	10,000,000
Assumption of maximum Tranche A loan commitment by JPMorgan Chase Bank N.A.			45,000,000			45,000,000														45,000,000
Commitment outstanding																		9,500,000	1,400,000
Fixed fee committed																					6,500,000	10,000,000
License fee committed																					19,500,000	20,000,000
Percentage of manufacturing capacity	50.00%
Percentage of fixed costs	50.00%					50.00%
Fixed Cost Commitments						4,300,000
Environmental cleanup costs, third-party claim costs, project management costs and legal costs			300,000		300,000	800,000	800,000
Estimated environmental remediation costs, minimum										1,700,000			6,300,000
Estimated environmental remediation costs, maximum										9,900,000			36,700,000
Amount accrued for environmental remediation expense										1,700,000			9,300,000
Estimated time frames to resolve contingency related to environmental remediation contingencies, years											1 year	30 years		1 year	30 years
Estimated environmental remediation costs, best estimate, undiscounted													11,800,000
Discount rate for environmental remediation costs, net of inflation													4.00%
Receivables of past and future environmental-related expenditures			2,500,000			2,500,000			2,400,000
Actual damages found by jury								40,000,000
Court ordered amount								102,000,000
Enhanced damages								80,000,000
Prejudgment interest to the damages award								13,000,000
Attorneys' fee added to the judgment								9,000,000
Full settlement of the lawsuit to the University of Pittsburgh			35,600,000
Loss Contingency Accrual				5,000,000
Litigation settlement				25,100,000		25,130,000
Prepaid Royalties			5,500,000			5,500,000
Payments for restructuring charges			$ 0			$ 0	$ 6,700,000