Power of Attorney

I, Elisha W. Finney, hereby constitute and appoint Crisanto C.
Raimundo, Franco N. Palomba, Tai-Yun Chen, John W. Kuo,
Kimberley E. Henningsen, Mary O'Byrne, Alan D. Palter,
Keith G. Askoff, S. Andrew Motozaki, Heather F. Harner, and
each of them individually, as my true and lawful
attorney-in-fact to:

1. Complete and execute on my behalf as an officer and/or director
of Varian Medical Systems, Inc. (the "Company") any Forms 3, 4, or
5, and any amendment thereto, required to be filed by me under
Section 16(a) of the Securities Exchange Act of 1934 and the rules
and regulations thereunder.

2. Do and perform any and all acts for and on my behalf which may
be necessary or desirable to complete any such Form 3, 4 or 5,
and any amendment thereto, and timely file such form or amended
form with the U.S. Securities and Exchange Commission and any
stock exchange or similar authority; and

3. Take any other action of any type whatsoever in connection with
the foregoing, which in the opinion of such attorney-in-fact may
be of benefit to, in the best interest of, or legally required of
me, it being understood that the documents executed by such
attorney-in-fact on my behalf pursuant to this Power of Attorney
shall be in such form and shall contain such information as such
attorney-in-fact may approve in such attorney-in-fact's discretion.

I hereby grant to each of such attorneys-in-fact full power
and authority to do and perform any and every act which is
necessary or desirable to be done in the exercise of any of the
powers and authority granted in this Power of Attorney, with full
power of substitution and revocation, and I ratify and confirm
every act that such attorney-in-fact lawfully performs or causes
to be done by virtue of this Power of Attorney and the powers and
authority granted herein.

I acknowledge that the attorneys-in-fact appointed in this Power
of Attorney, in serving in such capacity at my request, are not
assuming, and the Company is not assuming, any of my
responsibilities to comply with Section 16 of the Securities
and Exchange Act of 1934 or the rules or regulations thereunder.

This Power of Attorney shall remain in full force and effect until
I am no longer required to file Forms 3, 4 or 5 with respect to my
holding or transactions in securities issued by the Company,
unless I earlier revoke this Power of Attorney in a signed writing
delivered to the foregoing attorneys-in-fact.

IN WITNESS WHEREOF, the undersigned has executed this power of
attorney as of this 11th day of August, 2006 at Palo Alto,
California.

					/s/ Elisha W. Finney

					_____________________
					Elisha W. Finney