Power of Attorney

I, Elisha W. Finney hereby constitute and appoint John W. Kuo, Crisanto
C. Raimundo, Franco N. Palomba, Mary O'Byrne, Alan Palter, Keith G.
Askoff, S. Andrew Motozaki, Tai-Yun Chen, and each of them individually,
as my true and lawful attorney-in-fact to:

1. Complete and execute on my behalf as an officer and/or director
of Varian Medical Systems, Inc. (the "Company") any Forms 3, 4, or
5 required to be filed by me under Section 16(a) of the Securities
Exchange Act of 1934 and the rules and regulations thereunder.

2. Do and perform any and all acts for and on my behalf which may be
necessary or desirable to complete any such Form 3, 4 or 5 and timely
file such form with the U.S. Securities and Exchange Commission and
any stock exchange or similar authority; and

3. Take any other action of any type whatsoever in connection with the
foregoing, which in the opinion of such attorney-in-fact may be of
benefit to, in the best interest of, or legally required of me, it
being understood that the documents executed by such attorney-in-fact
on my behalf pursuant to this Power of Attorney shall be in such form
and shall contain such information as such attorney-in-fact may approve
in such attorney-in-fact's discretion.

I hereby grant to each of such attorneys-in-fact full power and authority
to do and perform any and every act which is necessary or desirable to be
done in the exercise of any of the powers and authority granted in this
Power of Attorney, with full power of substitution and revocation, and I
rarify and confirm every act that such attorney-in-fact lawfully performs
or causes to be done by virtue of this Power of Attorney and the powers
and authority granted herein.

I acknowledge that the attorneys-in-fact appointed in this Power of Attorney,
in serving in such capacity at my request, are not assuming, and the Company
is not assuming, any of my responsibilities to comply with Section 16 of the
Securities and Exchange Act of 1934 or the rules or regulations thereunder.

This Power of Attorney shall remain in full force and effect until I am no
longer required to file Forms 3, 4 or 5 with respect to my holding or
transactions in securities issued by the Company, unless I earlier revoke
this Power of Attorney in a signed writing delivered to the foregoing
attorneys-in-fact.

IN WITNESS WHEREOF, the undersigned has executed this power of attorney
as of this 15th day of September, 2005 at Palo Alto, California.

					/s/ Elisha W. Finney

					_____________________________
					Elisha W. Finney