X0508 4 2026-03-02 0 0000704532 ONTO INNOVATION INC. ONTO 0001976282 YALDAEI RAMIL C/O ONTO INNOVATION INC. 16 JONSPIN ROAD WILMINGTON MA 01887 0 1 0 0 Chief Operating Officer 0 Common Stock 2026-03-02 4 A 0 7683 0.0 A 19051 D Common Stock 2026-03-03 4 F 0 615 207.5 D 18436 D Performance Stock Unit 2026-03-02 4 A 0 1548 0.0 A 2028-03-02 Common Stock 1548 1548 D Performance Stock Unit 2026-03-02 4 A 0 1548 0.0 A 2029-03-02 Common Stock 1548 1548 D The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date. Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person. The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date. By: Eric French For: Ramil Yaldaei 2026-03-04