X0206 3 2022-02-23 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001908822 Quirk Jeanne C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 1 0 0 0 Common Stock 0 D Ms. Quirk did not own any reportable securities, directly or indirectly, prior to becoming a reporting person. A Power of Attorney is filed as Exhibit 24.1 to this Form 3. Lynnette C. Fallon, as attorney in fact for Jeanne Quirk 2022-02-23