Acquisitions (Details) (USD $)	12 Months Ended						12 Months Ended		5 Months Ended	12 Months Ended			7 Months Ended	12 Months Ended
	Dec. 31, 2011	Dec. 31, 2010	Dec. 31, 2009	Dec. 31, 2011 VIOX Corporation [Member]	Jan. 03, 2011 VIOX Corporation [Member]	Dec. 31, 2011 VIOX Corporation [Member] Non-amortizing tradename [Member]	Dec. 31, 2011 VIOX Corporation [Member] Technology-based Intangible Assets [Member]	Dec. 31, 2011 VIOX Corporation [Member] Noncompete agreement [Member]	Jun. 01, 2009 Diaphorm Technologies, LLC [Member]	Dec. 31, 2011 Diaphorm Technologies, LLC [Member]	Dec. 31, 2010 Diaphorm Technologies, LLC [Member]	Dec. 31, 2009 Diaphorm Technologies, LLC [Member]	Aug. 11, 2008 SemEquip, Inc. [Member]	Dec. 31, 2011 SemEquip, Inc. [Member]	Dec. 31, 2009 SemEquip, Inc. [Member]	Dec. 31, 2008 SemEquip, Inc. [Member]
Business Acquisition [Line Items]
Percentage acquired (in hundredths)				100.00%
Maximum contingent consideration				$ 22,000,000					$ 10,000,000							$ 100,000,000
Contingent consideration time frame (in months or years)				30M					5Y							15Y
Age of acquired corporation				40 years
Purchase price [Abstract]
Cash consideration paid					27,673,000				9,700,000				25,000,000
Cash Paid At Closing					26,000,000
Post Closing Adjustment					1,700,000
Accrued contingent purchase consideration					11,521,000				5,100,000				25,200,000
Section 338 Election liability to former VIOX stockholders					775,000
Total purchase price					39,969,000
Purchase price allocation [Abstract]
Accounts receivable, net					2,385,000
Inventories					2,702,000
Other current assets					706,000
Property, plant and equipment					3,490,000
Intangible assets					23,600,000
Goodwill					7,797,000
Other noncurrent assets					1,269,000
Accounts payable and other liabilities					(1,980,000)
Purchase price, total					39,969,000
Acquired finite-lived intangible asset							20,000,000	600,000
Acquired finite-lived intangible asset, useful life							20 years	3 years
Acquired indefinite-lived intangible asset						3,000,000
Goodwill, Impairment Loss	7,797,000	0	3,832,000	7,800,000
Acquired entity's sales during the period				20,300,000
Liabilities assumed												274,000
Additional contingent purchase consideration accrued										1,100,000	1,600,000				(800,000)
Transaction and related costs									340,000				2,000,000
Contingent consideration earned and paid										500,000	300,000	1,000,000
Incentive compensation distributed to certain employees of acquired company													1,700,000
Pre-tax compensation charge														$ (6,900,000)		$ 9,800,000