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Balance Sheet Components - Inventories (Details) - USD ($)
$ in Thousands
3 Months Ended
Mar. 31, 2022
Mar. 31, 2021
Dec. 31, 2021
Organization, Consolidation and Presentation of Financial Statements [Abstract]      
Raw materials $ 68,964   $ 65,225
Work in progress 31,534   25,062
Finished goods 21,559   18,269
Service parts 6,330   6,000
Total inventories 128,387   $ 114,556
Write-down of inventories $ 0 $ 500