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Related Party Transactions (Details) - USD ($)
$ in Thousands
3 Months Ended 12 Months Ended
Mar. 31, 2021
Mar. 31, 2020
Dec. 31, 2020
Dec. 31, 2019
Related Party Transaction        
Accounts receivable due from related party $ 14,100   $ 13,900 $ 5,800
Noncontrolling Common Stockholder        
Related Party Transaction        
Accounts receivable due from related party 5   17 38
Accounts payable to related party 370   512 272
Accrued Royalties, Related Party 4   100  
Noncontrolling Common Stockholder | Nexperia        
Related Party Transaction        
Accounts payable to related party 11   24  
Noncontrolling Common Stockholder | Research and development        
Related Party Transaction        
Related party transaction expenses       21
Noncontrolling Common Stockholder | Sale of Products        
Related Party Transaction        
Revenue from related parties 12 $ 13 165 241
Noncontrolling Common Stockholder | License Maintenance Fee        
Related Party Transaction        
Related party transaction expenses 54 50 200 200
Common Stockholder        
Related Party Transaction        
Revenue from related parties       504
Accounts receivable due from related party 503   435 426
Common Stockholder | Reimbursement for research and development        
Related Party Transaction        
Revenue from related parties   177 408  
Common Stockholder | Sale of Products        
Related Party Transaction        
Revenue from related parties 304 344 915  
Common Stockholder | License Maintenance Fee        
Related Party Transaction        
Reduction in license maintenance fees 38   150  
Common Stockholder | License Fee Income        
Related Party Transaction        
Revenue from related parties 357 37 5,200 195
Common Stockholder | Interest Expense        
Related Party Transaction        
Related party transaction expenses 150 152 610 608
Accounts receivable due from related party       9,200
Common Stockholder | EPI Gen 4 wafer growth sales        
Related Party Transaction        
Revenue from related parties     701  
Corporate Joint Venture        
Related Party Transaction        
Accounts receivable due from related party 13,500   13,500 5,300
Corporate Joint Venture | Related Party Services        
Related Party Transaction        
Related party transaction expenses 406 111 241 211
Corporate Joint Venture | Research and development        
Related Party Transaction        
Related party transaction expenses 144 245 919 695
Corporate Joint Venture | Reimbursement for research and development        
Related Party Transaction        
Related party transaction expenses   177 408 195
Corporate Joint Venture | Commitment For Services        
Related Party Transaction        
Related party transaction expenses   84 $ 84 444
Corporate Joint Venture | Reimbursement from payroll related costs        
Related Party Transaction        
Related party transaction expenses $ 9 $ 14   $ 14