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Related Party Transactions (Details) - USD ($)
$ in Thousands
3 Months Ended 9 Months Ended 12 Months Ended
Sep. 30, 2020
Sep. 30, 2019
Sep. 30, 2020
Sep. 30, 2019
Dec. 31, 2019
Dec. 31, 2018
Related Party Transaction            
Accounts receivable due from related party $ 12,300   $ 12,300   $ 5,800 $ 3,100
Accounts payable to related party         272 122
Noncontrolling Common Stockholder            
Related Party Transaction            
Accounts receivable due from related party 113   113   38 123
Accounts payable to related party 434   434   272  
Noncontrolling Common Stockholder | Research and development            
Related Party Transaction            
Related party transaction expenses       $ 21    
Noncontrolling Common Stockholder | Sale of Products            
Related Party Transaction            
Products sold to related party 113 $ 58 153 216 241 269
Noncontrolling Common Stockholder | License Maintenance Fee            
Related Party Transaction            
Related party transaction expenses 50   150 100 200 200
Common Stockholder            
Related Party Transaction            
Products sold to related party   178   293    
Accounts receivable due from related party 532   532   426  
Common Stockholder | Reimbursement for research and development            
Related Party Transaction            
Products sold to related party     408      
Common Stockholder | Reimbursement from payroll related costs            
Related Party Transaction            
Related party transaction expenses         21 71
Common Stockholder | Sale of Products            
Related Party Transaction            
Products sold to related party 174   877     37
Common Stockholder | License Maintenance Fee            
Related Party Transaction            
Related Party Transaction, Reduction Of Expenses From Transactions With Related Party 38   113      
Common Stockholder | License Fee Income            
Related Party Transaction            
Products sold to related party 31 38 5,100 113    
Common Stockholder | Interest Expense            
Related Party Transaction            
Related party transaction expenses 153 153 457 455    
Accounts receivable due from related party   16,000   16,000    
Common Stockholder | Other Receivable            
Related Party Transaction            
Accounts receivable due from related party 338   338      
Common Stockholder | EPI Gen 4 Wafer Growth Sales [Member]            
Related Party Transaction            
Products sold to related party 280 0 280 0    
Common Stockholder | Reimbursements In License Maintenance [Member]            
Related Party Transaction            
Products sold to related party   16,000        
Convertible Preferred Stockholder            
Related Party Transaction            
Accounts receivable due from related party         426 54
Convertible Preferred Stockholder | Reimbursement for research and development            
Related Party Transaction            
Products sold to related party         195  
Convertible Preferred Stockholder | Sale of Products            
Related Party Transaction            
Products sold to related party         504 166
Convertible Preferred Stockholder | License Fee Income            
Related Party Transaction            
Products sold to related party         9,200 3,000
Corporate Joint Venture            
Related Party Transaction            
Accounts receivable due from related party 11,300   11,300   5,300 3,000
Corporate Joint Venture | Related Party Services            
Related Party Transaction            
Related party transaction expenses 60 379 228 477 211 751
Corporate Joint Venture | Research and development            
Related Party Transaction            
Related party transaction expenses 418 117 1,100 320 695 560
Corporate Joint Venture | Reimbursement for research and development            
Related Party Transaction            
Related party transaction expenses     408   195  
Corporate Joint Venture | Commitment For Services            
Related Party Transaction            
Related party transaction expenses     84   444  
Corporate Joint Venture | Reimbursement from payroll related costs            
Related Party Transaction            
Related party transaction expenses $ 10 $ 6 $ 11 $ 21 $ 14 175
Noncontrolling Common Stockholder And Noteholder            
Related Party Transaction            
Accounts receivable due from related party           $ 10