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Related Party Transactions (Details) - USD ($)
$ in Thousands
3 Months Ended 9 Months Ended
Sep. 30, 2020
Sep. 30, 2019
Sep. 30, 2020
Sep. 30, 2019
Dec. 31, 2019
Related Party Transaction          
Accounts receivable due from related party $ 12,300   $ 12,300   $ 5,800
Noncontrolling Common Stockholder          
Related Party Transaction          
Accounts receivable due from related party 113   113   38
Accounts payable to related party 434   434   272
Noncontrolling Common Stockholder | Research and development          
Related Party Transaction          
Related party transaction expenses       $ 21  
Noncontrolling Common Stockholder | Sale of Products          
Related Party Transaction          
Revenue from related parties 113 $ 58 153 216  
Noncontrolling Common Stockholder | License Maintenance Fee          
Related Party Transaction          
Related party transaction expenses 50   150 100  
Common Stockholder          
Related Party Transaction          
Revenue from related parties   178   293  
Accounts receivable due from related party 532   532   426
Common Stockholder | Reimbursement for research and development          
Related Party Transaction          
Revenue from related parties     408    
Common Stockholder | Sale of Products          
Related Party Transaction          
Revenue from related parties 174   877    
Common Stockholder | License Maintenance Fee          
Related Party Transaction          
Reduction in license maintenance fees 38   113    
Common Stockholder | License Fee Income          
Related Party Transaction          
Revenue from related parties 31 38 5,100 113  
Common Stockholder | Interest Expense          
Related Party Transaction          
Related party transaction expenses 153 153 457 455  
Accounts receivable due from related party   16,000   16,000  
Common Stockholder | Other Receivable          
Related Party Transaction          
Accounts receivable due from related party 338   338    
Common Stockholder | Reimbursements In License Maintenance          
Related Party Transaction          
Revenue from related parties   16,000      
Common Stockholder | EPI Gen 4 wafer growth sales          
Related Party Transaction          
Revenue from related parties 280 0 280 0  
Corporate Joint Venture          
Related Party Transaction          
Accounts receivable due from related party 11,300   11,300   $ 5,300
Corporate Joint Venture | Related Party Services          
Related Party Transaction          
Related party transaction expenses 60 379 228 477  
Corporate Joint Venture | Research and development          
Related Party Transaction          
Related party transaction expenses 418 117 1,100 320  
Corporate Joint Venture | Reimbursement for research and development          
Related Party Transaction          
Related party transaction expenses     408    
Corporate Joint Venture | Commitment For Services          
Related Party Transaction          
Related party transaction expenses     84    
Corporate Joint Venture | Reimbursement from payroll related costs          
Related Party Transaction          
Related party transaction expenses $ 10 $ 6 $ 11 $ 21