REVENUE FROM CONTRACTS WITH CUSTOMERS - Disaggregated Revenue (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2023	Jun. 30, 2022	Jun. 30, 2023	Jun. 30, 2022
Disaggregated Revenue Information [Abstract]
Revenue (note 3)	$ 144,577	$ 104,395	$ 218,833	$ 146,581
Mainland China
Disaggregated Revenue Information [Abstract]
Revenue (note 3)	134,767	100,275	207,226	142,405
Other Regions
Disaggregated Revenue Information [Abstract]
Revenue (note 3)	9,810	4,120	11,607	4,176
Single wafer cleaning, Tahoe and semi-critical cleaning equipment
Disaggregated Revenue Information [Abstract]
Revenue (note 3)	112,528	72,583	149,142	98,616
ECP (front-end and packaging), furnace and other technologies
Disaggregated Revenue Information [Abstract]
Revenue (note 3)	19,117	20,500	45,715	32,748
Advanced packaging (excluding ECP), services & spares
Disaggregated Revenue Information [Abstract]
Revenue (note 3)	12,932	11,312	23,976	15,217
Wet-cleaning and other front-end processing tools
Disaggregated Revenue Information [Abstract]
Revenue (note 3)	122,415	79,553	178,797	111,254
Advanced packaging, other processing tools, services and spares
Disaggregated Revenue Information [Abstract]
Revenue (note 3)	$ 22,162	$ 24,842	$ 40,036	$ 35,327