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REVENUE FROM CONTRACTS WITH CUSTOMERS (Tables)
 6 Months Ended
Jun. 30, 2026
Revenue from Contract with Customer [Abstract]  
Disaggregated Revenue Information The following table presents disaggregated revenue information:
Three Months Ended June 30,Six Months Ended June 30,
2026202520262025
Single Wafer Cleaning, Tahoe and Semi-Critical Cleaning Equipment$132,978 $154,961 $255,460 $284,530 
ECP (front-end and packaging), Furnace and Other Technologies128,546 48,016 212,785 75,646 
Advanced Packaging (excluding ECP), Services & Spares31,395 12,395 55,937 27,543 
Total revenue by product category$292,919 $215,372 $524,182 $387,719 
Accounts Receivables and Contract Liabilities
Below are the contract liabilities balances as of:
June 30,
2026		December 31,
2025
Advances from customers$165,566 $187,809 
Deferred revenue15,908 17,388 
Total contract liabilities$181,474 $205,197 
Below are revenues recognized from amounts included in contract liabilities at the beginning of the period:
Three Months Ended June 30,Six Months Ended June 30,
2026202520262025
Revenue recognized from amounts included in contract liabilities at the beginning of the periods$55,672 $58,122 $141,750 $120,241