REVENUE FROM CONTRACTS WITH CUSTOMERS - Disaggregated Revenue (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2025	Dec. 31, 2024	Dec. 31, 2023
Disaggregated Revenue Information [Abstract]
Revenues	$ 901,309	$ 782,118	$ 557,723
Single Wafer Cleaning, Tahoe and Semi-Critical Cleaning Equipment
Disaggregated Revenue Information [Abstract]
Revenues	625,964	578,887	403,851
ECP (front-end and packaging), Furnace and Other Technologies
Disaggregated Revenue Information [Abstract]
Revenues	199,551	151,057	103,356
Advanced Packaging (excluding ECP), Services & Spares
Disaggregated Revenue Information [Abstract]
Revenues	$ 75,794	$ 52,174	$ 50,516