OTHER LONG-TERM LIABILITIES (Details) - USD ($) $ in Thousands	Mar. 31, 2023	Dec. 31, 2022
Other Long-term Liabilities [Abstract]
Other long-term liabilities	$ 7,195	$ 7,321
Subsidies to Stress Free Polishing project, commenced in 2008 and 2017
Other Long-term Liabilities [Abstract]
Other long-term liabilities	585	611
Subsidies to Electro Copper Plating project, commenced in 2014
Other Long-term Liabilities [Abstract]
Other long-term liabilities	114	119
Subsidies to other cleaning tools, commenced in 2020
Other Long-term Liabilities [Abstract]
Other long-term liabilities	760	785
Subsidies to SW Lingang R&D development, commenced in 2021
Other Long-term Liabilities [Abstract]
Other long-term liabilities	4,218	4,266
Subsidies to CO2 Technology, commenced in 2022
Other Long-term Liabilities [Abstract]
Other long-term liabilities	796	965
Other
Other Long-term Liabilities [Abstract]
Other long-term liabilities	$ 722	$ 575