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OTHER LONG-TERM LIABILITIES (Tables)
 3 Months Ended
Mar. 31, 2023
Other Liabilities Disclosure [Abstract]  
Other Long-Term Liabilities
Other long-term liabilities represent government subsidies received from PRC governmental authorities for development and commercialization of certain technology but not yet recognized. At March 31, 2023 and December 31, 2022, other long-term liabilities consisted of the following unearned government subsidies:
March 31, 2023December 31, 2022
Subsidies to Stress Free Polishing project, commenced in 2008 and 2017$585 $611 
Subsidies to Electro Copper Plating project, commenced in 2014114 119 
Subsidies to other cleaning tools, commenced in 2020760 785 
Subsidies to SW Lingang R&D development, commenced in 20214,218 4,266 
Subsidies to CO2 Technology, commenced in 2022796 965 
Other722 575 
Total$7,195 $7,321