OTHER LONG-TERM LIABILITIES (Tables)

12 Months Ended

Dec. 31, 2022

OTHER LONG-TERM LIABILITIES [Abstract]

Other Long-Term Liabilities

Other long-term liabilities represent government subsidies received from PRC governmental authorities for development and commercialization of certain technology but not yet recognized (note 2). As of December 31, 2022 and 2021, other long-term liabilities consisted of the following unearned government subsidies:

	December 31,
	2022		2021
Subsidies to Stress Free Polishing project, commenced in 2008 and 2017	$	611	$	791
Subsidies to Electro Copper Plating project, commenced in 2014		119		160
Subsidies to other cleaning tools, commenced in 2020		785		1,014
Subsidies to SW Lingang R&D development in 2021		4,266		5,958
Subsidies to CO2 Technology		965		-
Other		575		524
Total	$	7,321	$	8,447