OTHER LONG-TERM LIABILITIES (Details) - USD ($) $ in Thousands	Dec. 31, 2021	Dec. 31, 2020
Other Long-term Liabilities [Abstract]
Other long-term liabilities	$ 8,447	$ 8,034
Subsidies to Stress Free Polishing Project, Commenced in 2008 and 2017 [Member]
Other Long-term Liabilities [Abstract]
Other long-term liabilities	791	1,266
Subsidies to Electro Copper Plating Project, Commenced in 2014 [Member]
Other Long-term Liabilities [Abstract]
Other long-term liabilities	160	2,156
Subsidies to Polytetrafluoroethylene, Commenced in 2018 [Member]
Other Long-term Liabilities [Abstract]
Other long-term liabilities	0	130
Subsidies to Tahoe-Single Bench Clean, Commenced in 2020 [Member]
Other Long-term Liabilities [Abstract]
Other long-term liabilities	0	1,544
Subsidies to Other Cleaning Tools, Commenced in 2020 [Member]
Other Long-term Liabilities [Abstract]
Other long-term liabilities	1,014	2,591
Subsidies to SW Lingang R&D development in 2021 [Member]
Other Long-term Liabilities [Abstract]
Other long-term liabilities	5,958	0
Other [Member]
Other Long-term Liabilities [Abstract]
Other long-term liabilities	$ 524	$ 347