OTHER LONG-TERM LIABILITIES

12 Months Ended

Dec. 31, 2021

OTHER LONG-TERM LIABILITIES [Abstract]

OTHER LONG-TERM LIABILITIES

NOTE 13 – OTHER LONG-TERM LIABILITIES

Other long-term liabilities represent government subsidies received from PRC governmental authorities for development and commercialization of certain technology but not yet recognized (note 2). As of December 31, 2021 and 2020, other long-term liabilities consisted of the following unearned government subsidies:

	December 31,
	2021		2020
Subsidies to Stress Free Polishing project, commenced in 2008 and 2017	$	791	$	1,266
Subsidies to Electro Copper Plating project, commenced in 2014		160		2,156
Subsidies to Polytetrafluoroethylene, commenced in 2018		-		130
Subsidies to Tahoe-Single Bench Clean, commenced in 2020		-		1,544
Subsidies to other cleaning tools,commenced in 2020		1,014		2,591
Subsidies to SW Lingang R&D development in 2021		5,958		-
Other		524		347
Total	$	8,447	$	8,034