OTHER LONG-TERM LIABILITIES (Tables)

9 Months Ended

Sep. 30, 2020

OTHER LONG-TERM LIABILITIES [Abstract]

Other long-term liabilities represent subsidies that we have received from governmental authorities, including China’s Ministry of Science and Technology, the Shanghai Municipal Commission of Economy and Information, and the Shanghai Science and Technology Committee, for development and commercialization of certain technology but have not yet earned and recognized. As of September 30, 2020 and December 31, 2019, other long-term liabilities consisted of the following unearned government subsidies:

	September 30, 2020		December 31, 2019
Subsidies to Stress Free Polishing project, commenced in 2008 and 2017	$	1,126	$	1,251
Subsidies to Electro Copper Plating project, commenced in 2014		2,188		2,666
Subsidies to Polytetrafluoroethylene, commenced in 2018		125		135
Subsidies to Tahoe-Single Bench Clean, commenced in 2020		1,962		-
Subsidies to Backside Clean-YMTC National Project, commenced in 2020		751		-
Other		302		134
Total	$	6,454	$	4,186